特許

SiFusionの技術[ページへの2.0リンク]進歩は統合された材料に14米国および4つを得た 国際的なパテント。 この革新的な技術は半導体等級の巧妙な製造を可能にする 多ケイ素からの炉の据え付け品-世界の最も純粋な商業材料。 統合された材料はこれをする第1および会社だけである。

Adhesive of a silicon and silica composite particularly useful for joining silicon parts
Patent: US7,083,694
Claims: 32
Date: August 1, 2006

Plasma spraying for joining silicon parts
Patent: US7,074,693
Claims: 19
Date: July 11, 2006

Silicon Fixture Supporting Silicon Wafers during High Temperature Processes
Patent: US6,979,659
Claims: 22
Date: December 27, 2005

Two Heat Sources for Welding Silicon
Patent: US6,838,636
Claims: 19
Date: January 4, 2005

High Temperature Hydrogen Anneal of Silicon Wafers Supported on a Silicon Fixture
Patent: US6,727,191
Claims: 18
Date: April 27, 2004

Wafer Support Fixture Composed of Silicon
Patent: US6,617,540
Claims: 15
Date: September 9, 2003

Method of Machining Silicon
Patent: US6,617,225
Claims: 22
Date: September 9, 2003

Welded Silicon Member
Patent: US6,583,377
Claims: 37
Date: June 24, 2003

Silicon Fixture for Supporting Wafers during Thermal Processing
Patent: US6,450,346
Claims: 18
Date: September 24, 2002

Method for Welding Silicon Work Pieces
Patent: US6,403,914
Claims: 22
Date: June 11, 2002

Silicon Support Members for Wafer Processing Fixtures
Patent: US6,357,432
Claims: 28
Date: March 19, 2002

Crack Free Welding of Silicon
Patent: US6,284,997
Claims: 20
Date: September 4, 2001

Method and Apparatus for Fabricating Elongate Crystalline Members
Patent: US6,205,993
Claims: 20
Date: May 27, 2001

Method and Apparatus for Securing Components of Wafer Processing Fixtures
Patent: US6,225,594
Claims: 26
Date: May 01, 2001

Support Members for Wafer Processing Fixtures
Patent: US6,196,211
Claims: 31
Date: March 6, 2001